検索対象:     
報告書番号:
※ 半角英数字
 年 ~ 
 年

Development of diagnostic method for deep levels in semiconductors using charge induced by heavy ion microbeams

重イオンにより誘起される電荷を用いた半導体中の深部欠陥準位の診断法の開発

加田 渉*; 神林 佑哉*; 岩本 直也*; 小野田 忍; 牧野 高紘; 江夏 昌志; 神谷 富裕; 星乃 紀博*; 土田 秀一*; 児島 一聡*; 花泉 修*; 大島 武

Kada, Wataru*; Kambayashi, Yuya*; Iwamoto, Naoya*; Onoda, Shinobu; Makino, Takahiro; Koka, Masashi; Kamiya, Tomihiro; Hoshino, Norihiro*; Tsuchida, Hidekazu*; Kojima, Kazutoshi*; Hanaizumi, Osamu*; Oshima, Takeshi

Deep level defects in semiconductors act as carrier traps Deep Level Transient Spectroscopy (DLTS) is known as one of the most famous techniques to investigate deep levels. However, DLTS does not well work for samples with high resistivity. To overcome this issue, DLTS using charge generated by ion incidence was proposed. Recently, we developed a deep level evaluation system based on Charge Transient Spectroscopy using alpha particles from $$^{241}$$Am (Alpha Particle Charge Transient Spectroscopy: APQTS) and reported the effect of deep levels in 6H SiC pn diodes generated by electron irradiation on the characteristics as particle detectors. In this study, we report the development of Charge Transient Spectroscopy using Heavy Ion Microbeams (HIQTS). The HIQTS can detect deep levels with micron meter spatial resolution since microbeams are applied. Thus, we can clarify the relationship between deep levels and device characteristics with micron meter resolution. When a 6H-SiC pn diode was irradiated with 12 MeV-oxygen (O) ions at 4$$times$$10$$^{9}$$ and 8$$times$$10$$^{9}$$ /cm$$^{2}$$, the charge collection efficiency (CCE) decreased to 71 and 52%, respectively. HIQTS signals obtained from those damaged regions using 15 MeV-O microbeams increased at measurement temperature ranges above 350 K, and the signals are larger with increasing 12 MeV-O ion fluence.

Access

:

- Accesses

InCites™

:

パーセンタイル:33.51

分野:Instruments & Instrumentation

Altmetrics

:

[CLARIVATE ANALYTICS], [WEB OF SCIENCE], [HIGHLY CITED PAPER & CUP LOGO] and [HOT PAPER & FIRE LOGO] are trademarks of Clarivate Analytics, and/or its affiliated company or companies, and used herein by permission and/or license.