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低軌道宇宙環境における水素化ダイヤモンドライクカーボン薄膜と原子状酸素の反応

Chemical reactions of hydrogenated diamond-like carbon thin films with oxygen atoms

田川 雅人*; 横田 久美子*; 松本 康司*; 北村 晃*; 山田 倫子*; 神田 一浩*; 新部 正人*; 吉越 章隆; 寺岡 有殿; Belin, M.*; Fontaine, J.*

Tagawa, Masahito*; Yokota, Kumiko*; Matsumoto, Koji*; Kitamura, Akira*; Yamada, Noriko*; Kanda, Kazuhiro*; Niibe, Masahito*; Yoshigoe, Akitaka; Teraoka, Yuden; Belin, M.*; Fontaine, J.*

水素化ダイヤモンドライクカーボン(HDLC)の宇宙環境下での原子状酸素による劣化について実験室環境で模擬試験を行った。HDLCはプラズマCVD法でSi基板上に作製した。原子状酸素ビームはレーザーデトネーション法で形成した。表面分析には放射光光電子分光法,ラザフォード後方散乱法,弾性反跳分析法,X線吸収端微細構造分析法を用いた。原子状酸素照射によって酸素の化学結合状態には大きな変化はないが、炭素と水素の濃度が低下した。sp$$^{2}$$/sp3$$^{3}$$比が減少したことからsp$$^{2}$$炭素の選択的エッチングが起こったと解釈した。

We have investigated on degradation of hydrogenated diamond-like carbon (HDLC) surfaces by atomic oxygen beams for space environments under laboratory environments. HDLC was formed on silicon surfaces by a plasma CVD method. The atomic oxygen neams were generated by a laser detonation method. The HDLC surfaces modified by the atomic oxygens were analyzed by Synchrotron Radiation Photo-Emission Spectroscopy (SRPES), Ratherford Backscattering Spectroscopy (RBS), Elestic Recoil Detection Analysis (ERDA), Near-Edge X-ray Absorption Fine Structure method (NEXAFS). Chemical bonding states of oxygen atoms were almost maintained as they were. Concentrations of carbon and hydrogen, sp$$^{2}$$/sp$$^{3}$$ ratio were decreased by the action of oxygen atoms. We concluded that carbon atoms in the sp$$^{2}$$ state were selectively etched out.

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