Fabrication of micro-prominences on PTFE surface using proton beam writing

プロトンビームライティングを使ったPTFE表面の微小突起創製

喜多村 茜; 佐藤 隆博; 江夏 昌志; 小林 知洋*; 神谷 富裕

Kitamura, Akane; Sato, Takahiro; Koka, Masashi; Kobayashi, Tomohiro*; Kamiya, Tomihiro

The unique microstructures were created at PTFE surface using proton beam writing. A conical structure about 250 m high were formed, when 3 MeV proton microbeam scanned spirally from the center at 500-m-thick PTFE surface. The structure was porous and the shape of the bottom corresponded to the beam scan pattern. The formation was caused by the volume expansion of the sample induced by the temperature elevation and the gas generation during the proton beam irradiation. The conical structure was fabricated by the upward volume expansion gradually advanced along the beam scan path.