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Microfabrication on Teflon surface by MeV-proton-microbeam and keV-nitrogen-ion-beam irradiation

MeV級プロトンマイクロビームとkeV級窒素化イオンビーム照射によるテフロン表面の微細加工

喜多村 茜; 佐藤 隆博; 江夏 昌志; 小林 知洋*; 神谷 富裕

Kitamura, Akane; Sato, Takahiro; Koka, Masashi; Kobayashi, Tomohiro*; Kamiya, Tomihiro

The micropatterns were created at PTFE surfaces covered with micro-protorusions using proton beam writing (PBW) and subsequent ion beam irradiation. The density of the inner sample was decreased by PBW and their patterns appeared after the keV ion beam irradiation. Their surface was very flat because they were melted by beam heating. The best fluenences of these beams for creating the surface were also obtained.

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パーセンタイル:43.78

分野:Instruments & Instrumentation

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