Fabrication of microstructure at a fluoropolymer surface by ion microbeam

イオンマイクロビームによるフッ素系樹脂表面における微細構造の創製

喜多村 茜; 佐藤 隆博; 江夏 昌志; 神谷 富裕; 小林 知洋*

Kitamura, Akane; Sato, Takahiro; Koka, Masashi; Kamiya, Tomihiro; Kobayashi, Tomohiro*

The raised microstructures were created at PTFE surface using ion microbeam. When 3-MeV proton microbeam scanned along a circle, the scanned area was roundly swelled in the case of a 100-m-thick sample. However, the shape was jagged at a surface of a 500-m-thick sample. The difference was caused by a variation in the speed of volume expansion along the ion trajectories. A porous conical structure was formed by spiral scanning from the center. In the other scan paths such as a raster, however, no raised structure appeared. The reason was that the volume expansion was enhanced only during the spiral scanning of the beams.