Modification of teflon surface by proton microbeam and nitrogen ion beam

プロトンマイクロビームと窒素イオンビームによるテフロン表面の改質

喜多村 茜; 佐藤 隆博; 江夏 昌志; 神谷 富裕; 小林 知洋*

Kitamura, Akane; Sato, Takahiro; Koka, Masashi; Kamiya, Tomihiro; Kobayashi, Tomohiro*

The morphology of the Teflon surface was studied after two different ion beams. Many voids were observed only inside of the Teflon sample after the focused 3-MeV proton microbeam scanning. Micro-protrusions were formed in dense after keV nitrogen ion beam irradiation at the surface. The surface was smooth after proton microbeam scanning and subsequent nitrogen ion beam irradiation, because of melting due to localized temperature-rise. The morphological design can be achieved at the surface of Teflon material by combination of different ion beam irradiation.