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多層膜構造解析に向けたスピンコントラスト変調中性子反射率法の開発

Development of spin-contrast-variation neutron reflectometry for structural analyses of multilayer films

熊田 高之   ; 三浦 大輔*; 阿久津 和宏*; 鈴木 淳市*; 鳥飼 直也*

Kumada, Takayuki; Miura, Daisuke*; Akutsu, Kazuhiro*; Suzuki, Junichi*; Torikai, Naoya*

スピンコントラスト変調中性子小角散乱法が複合材料における散乱を成分ごとに切り分けてそれぞれの構造を決定したように、スピンコントラスト中性子反射率法では薄膜試料における反射を面ごとに識別してそれぞれの構造を決定できることが示された。

We developed a technique of spin-contrast-variation neutron reflectivity (SCV-NR) for structural analyses of multilayer films. The SCV-NR curves of the polystyrene monolayer film were precisely reproduced using a common set of structural parameters and neutron scattering length density at each proton polarization. This result ensures that SCV-NR curves are not deformed by inhomogeneous PH due to the spin-diffusion mechanism. The number of structural parameters of the lamellar microphase-separated poly(styrene-block-isoprene) thin film is too large to determine with a single unpolarized reflectivity curve only. However, these parameters converged through the global analysis of the SCV-NR curves. In this manner, SCV-NR determines the structure of multilayer films while excluding the incorrect structural model that accidentally accounts for a single unpolarized reflectivity curve only.

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